Title:
FEEDTHROUGH
Document Type and Number:
Japanese Patent JPS6070960
Kind Code:
A
Abstract:
PURPOSE:To enhance the reliability by providing a sensor for detecting the synchronously rotating state of a vacuum side rotor and an atmospheric side rotor of a feedthrough at the atmospheric side. CONSTITUTION:Rotary sensors 5a1, 5b1 are respectively mounted at arbitrary positions on the circumference of the rotational shaft of an atmospheric side rotor 1 and a vacuum side rotor 3, and rotary sensors 5a1, 5b1 are opposed, stationary sensors 5a2, 5b2 are mounted in a housing 6 at a vacuum system, i.e., at the atmospheric side. If a malfunction occurs in the rotations at the vacuum side and the atmospheric side due to a certain reason and a displacement or a slip occurs, a timing displacement occurs at the outputs of the sensors 5a1, 5b1 and 5a2, 5b2. An alarm is generated by this output, and the rotations of the rotors 1, 3 are corrected.
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Inventors:
AOYAMA HIROSHI
SUZUKI YASUHIKO
SUZUKI YASUHIKO
Application Number:
JP17729683A
Publication Date:
April 22, 1985
Filing Date:
September 26, 1983
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H02K49/06; (IPC1-7): H02K49/06
Attorney, Agent or Firm:
Sugano Naka
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