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Patent Searching and Data


Title:
FERRODIELECTRIC MATERIAL ACTUATOR
Document Type and Number:
Japanese Patent JPH06335270
Kind Code:
A
Abstract:

PURPOSE: To enable generation of extremely large surface charge by providing an electrostatic electricity holding means in such a manner as inverting the polarization generated in a ferrodielectric material to generate an electrostatic repulsion force 31 between the ferrodielectric material through application of such inverted polarization on the surface charge generated on the ferrodielectric material.

CONSTITUTION: Interdigital electrode members 321 to 324, 331 to 333 are suspended from a side body portion 31 by means of holding members 461 to 474 having the spring property so that these electrodes members are arranged at equal intervals. These interdigital electrode members 321 to 324, 331 to 333 are constituted by a conductive framework member 351, ferrodielectric films 381 to 385 having the same thickness, electrodes 361, 371, 362, 372, 39, 401, 411, 407 provided at the upper layer and terminals 42 to 45 to supply a ferrodielectric material polarization inverting voltage. The framework member 351 is electrically lifted, positive and negative voltages are applied to the terminals 42, 43 and positive and negative voltages are also applied to the electrodes 361 and 39 provided opposed to 44, 45, 371 and 401, 362 and 411, 372 and 402 so that polarility of charge is a combination of the positive and negative voltages.


Inventors:
ADACHI HIDEO
Application Number:
JP11603293A
Publication Date:
December 02, 1994
Filing Date:
May 18, 1993
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B21/30; B81B3/00; H01L41/08; H02N1/00; H02N11/00; (IPC1-7): H02N11/00; H01L41/08
Attorney, Agent or Firm:
Takehiko Suzue