Title:
FERRODIELECTRIC THIN FILM DEVICE
Document Type and Number:
Japanese Patent JPS62252005
Kind Code:
A
Inventors:
TAKAYAMA RYOICHI
TOMITA YOSHIHIRO
IIJIMA KENJI
UEDA ICHIRO
TOMITA YOSHIHIRO
IIJIMA KENJI
UEDA ICHIRO
Application Number:
JP9710286A
Publication Date:
November 02, 1987
Filing Date:
April 25, 1986
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L41/187; G01J5/02; G01J5/34; H01B3/00; H01B3/12; H01L41/18; (IPC1-7): G01J5/02; H01B3/00; H01B3/12; H01L41/18
Domestic Patent References:
| JPS60131704A | 1985-07-13 |
Attorney, Agent or Firm:
Tomoyuki Takimoto