Title:
FERROELECTRIC FILM AND ITS FORMING METHOD
Document Type and Number:
Japanese Patent JP2006120513
Kind Code:
A
Abstract:
To provide a ferroelectric film and its forming method which control the orientation and form a ferroelectric having proper characteristics.
The forming method of a ferroelectric film comprises a step of crystallizing a raw material body 20 of a complex oxide which step comprises a step of performing a first heat treatment to form an initial nucleus, and a step of a second heat treatment for making crystallization growth at a temperature lower than that in the first heat treatment.
Inventors:
KONISHI AKIO
Application Number:
JP2004308173A
Publication Date:
May 11, 2006
Filing Date:
October 22, 2004
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01B19/00; H01B3/12; H01L21/316; H01L21/8246; H01L27/105; H01L41/187; H01L41/39; H01L41/43
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi
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