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Title:
FERROELECTRIC SUBSTANCE PARTICLE WITH PHOTOSENSITIVITY, FERROELECTRIC SUBSTANCE THIN FILM MANUFACTURED BY USING THE SAME, AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP2000208824
Kind Code:
A
Abstract:

To improve the dispersion of ferroelectric substance particles so as to realize high sensitivity and high resolution by providing a photoreactive group a part of the surface of the ferroelectric substance particles.

A photoreactive group selected from a (meta)acryloyl group and a vinyl group is introduced partly onto the surface of ferroelectric substance particles made mainly of titanate zircon acid lead. Namely, since a functional group such as hydroxyl group exists on the surface of the ferroelectric substance particles, the functional group is allowed to react with a compound having a photoreactive group so that the photoreactive group is introduced onto the surface of the ferroelectric substance particles. Thus, a photosensitive composition containing ferroelectric substance particles and photosensitive agent is applied to a base material to form a photosensitive layer, and the photosensitive layer is exposed and developed to form a specified pattern, and then it is heated and baked so as to manufacture a ferroelectric substance thin film.


Inventors:
HANABATAKE MAKOTO
YASUDA NORIMOTO
Application Number:
JP605299A
Publication Date:
July 28, 2000
Filing Date:
January 13, 1999
Export Citation:
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Assignee:
KANSAI RES INST
International Classes:
H01L41/08; G03F7/004; H01L41/193; H01L41/45; (IPC1-7): H01L41/08; G03F7/004; H01L41/193; H01L41/26
Attorney, Agent or Firm:
Masahiro Okada