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Title:
FERROELECTRIC THIN FILM AND FERROELECTRIC THIN FILM COATED BOARD AND MANUFACTURE OF FERROELECTRIC THIN FILM
Document Type and Number:
Japanese Patent JP3476932
Kind Code:
B2
Abstract:

PURPOSE: To manufacture a dense and smooth surface a-axis oriented film with an excellent ferroelectric characteristic at a low temperature with excellent reproducibility for applying a ferroelectric substance Bi4Ti3O12 to the development of various kinds of devices, such as a ferroelectric non-volatile memory, a pyroelectric sensor.
CONSTITUTION: When a ferroelectric substance Bi4Ti3O12 thin film 6 is formed on a board 1 on the surface of which a Pt electrode 4 is made by an MOCVD method, by interposing a titanium oxide buffer layer 5, the density and the surface smoothness of the Bi4Ti3O12 thin film 6 manufactured thereon is improved. By setting a board temperature to from 360°C to 400°C at a film forming time so that the film lacks a Bi composition, Bi4Ti3O12 microcrystal grains are dispersed in an amorphous titanium oxide medium so that a quite dense and smooth surface Bi4Ti3O12 a-axis oriented film can be manufactured with excellent reproducibility.


Inventors:
Ken Kijima
Sakiko Sato
Hironori Matsunaga
Noboru Ohtani
Masayoshi Kiba
Application Number:
JP30213394A
Publication Date:
December 10, 2003
Filing Date:
December 06, 1994
Export Citation:
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Assignee:
Sharp Corporation
International Classes:
C01G49/00; C01G29/00; C23C16/40; C23C16/56; H01B3/02; H01B3/10; H01B3/12; H01B17/60; H01B19/00; H01L21/336; H01L21/8242; H01L21/8246; H01L21/8247; H01L27/10; H01L27/105; H01L27/108; H01L29/788; H01L29/792; H01L41/39; H01L49/02; (IPC1-7): H01B17/60; C01G29/00; H01B3/12; H01B19/00; H01L21/8242; H01L21/8247; H01L27/10; H01L27/108; H01L29/788; H01L29/792; H01L41/24; H01L49/02
Domestic Patent References:
JP4980598A
JP4133369A
JP613542A
Attorney, Agent or Firm:
Yoshio Kawaguchi (1 person outside)