Title:
FERROELECTRIC THIN FILM ELEMENT AND ITS MANUFACTURING METHOD, AND INK JET RECORDING HEAD AND INK JET PRINTER USING THE SAME
Document Type and Number:
Japanese Patent JP2002043642
Kind Code:
A
Abstract:
To provide a ferroelectric thin film element having excellent characteristics, and its manufacturing method, in which diffusion of lead atoms into a lower electrode and oxidation of the lower electrode are prevented while controlling the orientation of a ferroelectric thin film appropriately.
The ferroelectric thin film element 100 has an upper electrode 44 and a lower electrode 42 sandwiching a ferroelectric thin film wherein the ferroelectric thin film 43 comprises a lamination of an initial layer 431 and a following layer 432. The following layer 432 has a crystal mean grain size smaller than that of the initial layer 431.
Inventors:
MURAI MASAMI
Application Number:
JP2000221213A
Publication Date:
February 08, 2002
Filing Date:
July 21, 2000
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L21/822; H01L27/04; H01L41/09; H01L41/187; H01L41/22; H01L41/318; H01L41/43; (IPC1-7): H01L41/09; B41J2/045; B41J2/055; B41J2/16; H01L27/04; H01L21/822; H01L41/187; H01L41/22
Attorney, Agent or Firm:
Yoshiyuki Inaba (2 outside)
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