Title:
FERROELECTRIC THIN FILM ELEMENT AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH05259472
Kind Code:
A
Abstract:
PURPOSE: To make it into such one that it is inexpensive and excellent in handling property, and is easy of driving as an electronic element.
CONSTITUTION: A platinum film 14 is made directly or through adhesive layers 12 excellent in adhesion on both sides on a heat-resistant substrate 10. A PLZT film 16 is made on this platinum film 14. Moreover, heat-resistant glass board such as quartz glass, etc., is used for the heat-resistant substrate 10, and to secure the adhesion with platinum, a titanium film 12 is made on this glass substrate 10, and thereon a platinum film 14 is made.
Inventors:
Takahiro Takahiro
Ikuo Tamura
Katsumi Yano
Tamagawa Tsutomu
Ikuo Tamura
Katsumi Yano
Tamagawa Tsutomu
Application Number:
JP9159692A
Publication Date:
October 08, 1993
Filing Date:
March 16, 1992
Export Citation:
Assignee:
Toyama Prefecture
Hokuriku Electric Industry Co., Ltd.
Hokuriku Electric Industry Co., Ltd.
International Classes:
G01H11/08; H01L21/8247; H01L27/10; H01L29/788; H01L29/792; H01L37/02; H01L49/02; (IPC1-7): H01L29/788; H01L29/792; G01H11/08; H01L27/10; H01L37/02; H01L49/02
Attorney, Agent or Firm:
Hirosawa Isao
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