Title:
強誘電体薄膜の製造方法及びその製造装置
Document Type and Number:
Japanese Patent JP4138196
Kind Code:
B2
Inventors:
Yoshiaki Yasuda
Masanao Tani
Masanao Tani
Application Number:
JP2000041160A
Publication Date:
August 20, 2008
Filing Date:
February 18, 2000
Export Citation:
Assignee:
Stanley Electric Co., Ltd.
International Classes:
C01G25/00; C23C14/08; C01G25/02; C23C14/32; C23C14/38
Domestic Patent References:
| JP2000017431A | ||||
| JP3271360A | ||||
| JP2000017429A | ||||
| JP4246168A |
Attorney, Agent or Firm:
Hiroyuki Niwa
Tadao Noguchi
Tadao Noguchi