Title:
FIELD EMISSION CATHODE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP2000011855
Kind Code:
A
Abstract:
To provide a field emission cathode that can emit electrons at a low voltage and can increase a field emission current.
In this field emission cathode, a cathode 1, an insulating layer 2 and a gate electrode 3 are laminated on a glass or ceramic substrate 8. Then, an opening (hole) 4 is formed in the insulating layer 2 and the gate electrode 3, and for instance, a cone-like emitter chip 5 is formed on the cathode 1 in its inside. The emitter chip 5 is a metal chip such as Mo having a small resistivity. The surface of the emitter chip 5 is thinly covered with a modified photoresist 6. The modified photoresist 6 is so formed that a photoresist 7 is provided with carbon-carbon bond by Ar+ ion irradiation or heat treatment in vacuum.
Inventors:
Otsu, Kazuyoshi
Taniguchi, Masateru
Taniguchi, Masateru
Application Number:
JP1998000169897
Publication Date:
January 14, 2000
Filing Date:
June 17, 1998
Export Citation:
Assignee:
FUTABA CORP
International Classes:
H01J9/02; H01J1/304; H01J9/02; H01J1/30; (IPC1-7): H01J1/304; H01J9/02
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