Title:
電界放出デバイス、システム及び方法
Document Type and Number:
Japanese Patent JP6608367
Kind Code:
B2
Abstract:
A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Inventors:
Plettner Thomas
Nasser-Godosy Meheran
Nasser-Godosy Meheran
Application Number:
JP2016543949A
Publication Date:
November 20, 2019
Filing Date:
September 16, 2014
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J37/073; H01J1/304; H01J37/20; H01J37/28
Domestic Patent References:
| JP2007080704A | ||||
| JP2003513407A | ||||
| JP2009129660A | ||||
| JP2005276720A | ||||
| JP2008078081A |
Foreign References:
| US20060054879 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office