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Patent Searching and Data


Title:
FIELD-EMISSION DISPLAY ELEMENT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2001176431
Kind Code:
A
Abstract:

To provide a field-emission display element using a perpendicularly oriented carbon nanotube.

On a lower substrate 30, a first metal film 32 for cathode electrode is formed and then a carbon nanotube 34 thereon. A first spacer 36 has been provided on the first metal film 32, and a meshwork of the second metal film 38 used as gate electrode is supported above the carbon nanotube 34. Provided on the first spacer 36 is a second spacer 49, on which an upper substrate 50 attached with a transparent electrode and fluorescent substance has been mounted. Accordingly, the structure is simple, production yield can be enhanced, and manufacturing of a large area is possible. Since this uses the carbon nanotube 34 oriented in the vertical direction as emitter tips, also, a large emission current can be obtained even with a low working voltage.


Inventors:
LEE CHEOL JIN
YOO JAE-EUN
Application Number:
JP2000321075A
Publication Date:
June 29, 2001
Filing Date:
October 20, 2000
Export Citation:
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Assignee:
LEE CHEOL JIN
ILJIN NANOTECH CO LTD
International Classes:
C23C16/26; H01J1/304; H01J9/02; H01J29/04; C01B31/02; H01J31/12; (IPC1-7): H01J31/12; C23C16/26; H01J9/02; H01J29/04
Attorney, Agent or Firm:
Hattori Masaki