Title:
FIELD EMISSION TYPE COLD CATHODE DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3296398
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a field emission type cold cathode device and its manufacture capable of sufficiently restraining the spread-out of electron beam without complicating a manufacturing process.
SOLUTION: The recessed portion on the substrate 35 side of an emitter 31 with the end 31a sharply protruded is buried with a resistance layer 33 and jointed to a glass substrate 35 via an emitter feeding electrode layer 34. A focusing electrode 36 has the top 36a approximately parallel to the face 35a of the substrate and the side 36b. A gate electrode 38 is arranged with an opening 38a to protrude the emitter end 31a therein and an opening 38b to correspond to the top 36a of the focusing electrode 36. An insulating layer 39 is formed between the gate electrode 38 and the emitter 31.
Inventors:
Toshimichi Hasegawa
Masayuki Nakamoto
Masayuki Nakamoto
Application Number:
JP23034695A
Publication Date:
June 24, 2002
Filing Date:
September 07, 1995
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01J9/02; H01J1/304; H01J3/02; H01J3/18; H01J9/14; H01J29/04; H01J29/62; H01J31/12; (IPC1-7): H01J1/304; H01J3/18; H01J9/02; H01J9/14; H01J29/04; H01J29/62; H01J31/12
Domestic Patent References:
| JP636682A | ||||
| JP5505906A |
Attorney, Agent or Firm:
Saichi Suyama