Title:
電界放出型冷陰極及び平面画像表示装置
Document Type and Number:
Japanese Patent JP4802363
Kind Code:
B2
Abstract:
Upon wet etching and thereby patterning carbon nanotubes (106) by a transfer method, a solution for dissolving a binder used in the transfer method as a solution used for the wet etching is used, and the carbon nanotubes (106) tangled with each other are rubbed off with a cloth-like substance (112) upon the wet etching. Furthermore, upon patterning the carbon nanotubes (106) using a dry etching method, a metal film or a film made of a substance resistant to damage upon the dry etching and causing no damage to the carbon nanotubes (106) when removed is used as a mask. A fine carbon nanotube pattern having an excellent flatness is formed.
Inventors:
Futonori Ito
Yuko Okada
Tomihari virtue
Kazuo Onuma
Akihiko Okamoto
Yuko Okada
Tomihari virtue
Kazuo Onuma
Akihiko Okamoto
Application Number:
JP2000362395A
Publication Date:
October 26, 2011
Filing Date:
November 29, 2000
Export Citation:
Assignee:
NEC
International Classes:
H01J1/304; H01J3/02; H01J9/02; H01J29/04; H01J31/12
Domestic Patent References:
| JP2000277002A |
Attorney, Agent or Firm:
Kimura Mitsuru