To provide a filed emission type electron source device having improved the ability of reading signal charges by reducing the flow-in amount of a beam current to a shield electrode to increase the beam current amount irradiated to a target.
The field emission type electron source device includes: an electron source array in which a plurality of emitters for emitting electrons are provided; a photoelectric conversion film in which a predetermined operation is performed by electron beams emitted from the electron source array; and an electrode having a plurality of through holes each of which inner wall surface is covered with a film of a secondary electron radiating material between the electron source array and the photoelectric conversion film.
KOGA KEISUKE
| JP2006134804A | 2006-05-25 | |||
| JPH0488745A | 1992-03-23 | |||
| JPH0785800A | 1995-03-31 | |||
| JPH05266789A | 1993-10-15 | |||
| JPH0660796A | 1994-03-04 |
Hiroki Naito
Daisuke Nagano
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