To provide a field emission type electron source excellent in durability, a yield rate, and electron beam emission performance, as well as an electron beam application device using the same.
For the electron source structured of a filament part made of carbon connected to an electrode, and solid protruded part of a conical or pyramid shape made of carbon integrally formed at a center of the filament part, at least an outermost surface of the protruded tip part is to be of a graphite layer. Further, the field emission type electron source is to be applied for various electron beam application devices. The electron source is structured of a solid protruded part with at least an outermost surface of its tip of a graphite layer, so that a tip shape of the protruded part as a field emission site is controlled, there is little defect in the graphite layer, and it is excellent in durability and electron emission performance.
Okai, Makoto
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