Title:
FIELD EMISSION TYPE ELECTRON TUBE
Document Type and Number:
Japanese Patent JP2716305
Kind Code:
B2
Abstract:
PURPOSE: To provide a field emission type electron tube, which has a long lifetime and which can emit electrons stably.
CONSTITUTION: Getter material 20, which is fused by the plasma flame spraying, is housed in a box-type boat 21. As the getter material 20, the material obtained by mixing a fine quantity (about 4%) of Ni in BaAl4 is used. A boat 21 is manufactured by performing the reactive ion etching(RIE) to W (tungsten). This boat 21 is housed in a case 22 (heat insulating type case), which is made of Si single crystal and which is formed into a clog-shape for heat insulation on the back surface support plate. A gas adsorption part base body 23 is made of Si single crystal as same as the heat insulating case 22, and of which the surface is formed into the uneven shape.
Inventors:
Tomoe Ise
Application Number:
JP34720991A
Publication Date:
February 18, 1998
Filing Date:
December 27, 1991
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01J29/94; H01J31/12; (IPC1-7): H01J31/12; H01J29/94
Domestic Patent References:
| JP2270250A | ||||
| JP6454664A | ||||
| JP4289640A | ||||
| JP440458U |
Attorney, Agent or Firm:
Yoshio Kawaguchi (1 person outside)
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