Title:
FIELD EMITTING CATHODE AND MANUFACTURE OF FIELD EMITTING CATHODE
Document Type and Number:
Japanese Patent JP3246137
Kind Code:
B2
Abstract:
PURPOSE: To easily manufacture a field emitting cathode having a focusing electrode.
CONSTITUTION: A cathode electrode layer 2, a resistance layer 3, a first insulating layer 4, a gate electrode layer 5, and a mask layer 6 are laminated on a base 1, and the mark layer 6 is etched to form a ring mask layer 8. A second insulating layer 9 and a focusing electrode layer 10 are then laminated thereon, and a first opening part 12 is formed to the gate electrode 5 according to the ring mask layer 8. A second opening part 13 is formed to the resistance layer with the ring mask layer 8 as a mask. An emitter cone 16 is formed in the second opening part 13.
Inventors:
Shigeo Ito
Takehiro Niiyama
Teruo Watanabe
Masateru Taniguchi
Takehiro Niiyama
Teruo Watanabe
Masateru Taniguchi
Application Number:
JP28726493A
Publication Date:
January 15, 2002
Filing Date:
October 25, 1993
Export Citation:
Assignee:
Futaba Electronics Co., Ltd.
International Classes:
H01J9/02; H01J1/30; H01J1/304; H01J3/18; H01J9/14; H01J29/04; H01J29/62; H01J31/12; (IPC1-7): H01J9/02; H01J1/304
Domestic Patent References:
| JP729484A | ||||
| JP5242794A | ||||
| JP5266806A |
Attorney, Agent or Firm:
Atsuo Waki (1 person outside)