To enhance the uniformity and improve the productivity by successively laminating first and second electrodes on a cathode electrode having a sharp peak and a cathode electrode from which the peak part is removed through an insulating film.
A field emitting device has a sharp peak formed in a part of a substantially flat field emitting cathode 31. On the surface excluding the peak part of the field emitting cathode electrode 31, a first electrode 33, a second insulating film 34, a second electrode 35 and an insulating film 36 are successively laminated. The upper side of the peak part of the field emitting cathode electrode 31 is opened to form a hole trench. The hole trench forms a passage for the electrons emitted from the peak of the cathode electrode 31. A silicon base 37 is formed so as to be inclined in the direction leaving the trench from a position slightly separated from the hole trench periphery to the upper part, and an insulating film 38 is laminated on the base 37.
SHOKU HO KAN
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