Title:
面加熱型赤外線放射加熱装置
Document Type and Number:
Japanese Patent JP4093897
Kind Code:
B2
Inventors:
Tomoyoshi Endo
Application Number:
JP2003097532A
Publication Date:
June 04, 2008
Filing Date:
April 01, 2003
Export Citation:
Assignee:
Thermo Riko Co., Ltd.
International Classes:
H05B3/00; F27B17/00; H01L21/26
Domestic Patent References:
| JP10082589A | ||||
| JP61211978A | ||||
| JP2001015248A | ||||
| JP2002261037A | ||||
| JP2000199688A | ||||
| JP2000045476A | ||||
| JP2003323971A |
Attorney, Agent or Firm:
Takeshi Kikuchi
Keiji Nakano
Keiji Nakano