Title:
加熱用フィラメントランプ
Document Type and Number:
Japanese Patent JP5500511
Kind Code:
B2
Abstract:
Disclosed herein is a filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp rotates relative to the workpiece and radiates light thereonto. The filament lamp can uniformly heat the overall area of the workpiece despite having a simple structure. The filament lamp extends, with respect to a radial direction of a circular radiation area corresponding to the workpiece, from a central portion of the radiation area to a perimeter portion thereof. The filament lamp includes an inner emitting part which extends in the radial direction from the central portion of the radiation area to the perimeter portion thereof; and an outer emitting part which extends in a circumferential direction on the perimeter portion of the radiation area. A circumferential component of the outer emitting part per unit length is longer than a circumferential component of the inner emitting part per unit length.
Inventors:
Yukio Ueshima
Nishikawa Masaaki
Nishikawa Masaaki
Application Number:
JP2012089813A
Publication Date:
May 21, 2014
Filing Date:
April 11, 2012
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01K7/00; H01L21/205; H01L21/26; H01L21/31
Domestic Patent References:
| JP2009117237A | ||||
| JP2001313152A | ||||
| JP1220389A | ||||
| JP2071987U |
Attorney, Agent or Firm:
Tsutomu Igarata