To provide a film bulk acoustic resonator (FBAR) element, which is applied to a ladder type filter, including a plurality of serial resonators and parallel resonators and is capable of realizing different resonant frequencies, and to provide a manufacturing method thereof.

The element is provided with a substrate 310, insulation layer 320 formed on the substrate 310, membrane-supporting layer 340 formed on the layer 320 and including a plurality of air gaps, membrane layer 350, formed on the layer 340 and including a plurality of active regions formed on portions overlapping with the air gaps, a plurality of lower electrodes 110, 210 formed on each of the active regions, a plurality of piezoelectric layers 120, 220 formed on the respective electrodes 110, 210, and a plurality of upper electrodes 130, 230 formed on the respective layers 120, 220. The thickness of each of the active regions of the layer 350 is adjusted, thereby the center frequencies of the serial and parallel resonators can be adjusted.