Title:
FILM CARRIER AND FILM CARRIER DEVICE, AND MANUFACTURE OF FILM CARRIER
Document Type and Number:
Japanese Patent JP3188783
Kind Code:
B2
Abstract:
PURPOSE: To limit noise due to high-frequency current while improving connection reliability by forming via holes having a specific cross section.
CONSTITUTION: Two metal sheets 1 and 2 are coated on one surface with polyimide 3 and 4, respectively, and heated to dry the polyimide. The sheets are joined with polyimide 3 and 4 in contact using polyimide varnish. A via hole 6 is opened through the metal sheet 2, polyimide 4 and polyimide varnish 5. The cross section of the via hole is wider at least 1 micron at the polyimide varnish 5 than at the metal sheet 2. This improves the adhesion to a metal film 7 that is formed later, thus improving connection reliability.
Inventors:
Samurai warrior
Yasuaki Masuko
Hosei Yongen
Hirokazu Kawamura
Yukihiro Ozawa
Yasuaki Masuko
Hosei Yongen
Hirokazu Kawamura
Yukihiro Ozawa
Application Number:
JP6144493A
Publication Date:
July 16, 2001
Filing Date:
February 26, 1993
Export Citation:
Assignee:
Mitsui Mining & Smelting Co., Ltd.
International Classes:
H01L21/60; H01L21/768; H05K1/00; H05K3/40; (IPC1-7): H01L21/60
Domestic Patent References:
| JP2159013A | ||||
| JP3237736A | ||||
| JP4196234A |
Attorney, Agent or Firm:
Tetsuya Ito