To provide a film deposition apparatus which uses a roll-to-roll system and which can remove and recover particles deposited on a substrate.

The film deposition apparatus for conveying a long substrate by the roll-to-roll system, includes a first roller located in the traveling direction of the long substrate, a second roller located next to the first roller with respect to the traveling direction of the long substrate, and a particle recovery container. The particle recovery container is provided below the first roller in the vertical direction.