Title:
FILM DEPOSITION DEVICE AND MAGNETIC CIRCUIT
Document Type and Number:
Japanese Patent JP2019104970
Kind Code:
A
Abstract:
To provide a film deposition device and a magnetic circuit which expand a range having uniaxial magnetic anisotropy in a magnetic film formed on a substrate.SOLUTION: The device includes: a target including a magnetic material having uniaxial magnetic anisotropy; and a first magnetic circuit 20 for forming a horizontal magnetic field parallel to a film deposition face between a substrate having film deposition face facing the target, and the target. The first magnetic circuit 20 includes: a first magnet 21 having one magnetic pole forming a first magnetic field including the magnetic field parallel to the film deposition face; a second magnet 22 having the other magnetic pole forming the first magnetic field; and a yoke 24 located on the side opposite to the target with respect to the target and connecting the first magnet 21 and the second magnet 22, the yoke 24 having at least a third magnet 23 forming a superposed magnetic field for forming a horizontal magnetic field with the first magnetic field by superposing the first magnetic field.SELECTED DRAWING: Figure 3
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Inventors:
TAMIYA SHINTARO
IBORI ATSUHITO
FUJINAGA TETSUSHI
IBORI ATSUHITO
FUJINAGA TETSUSHI
Application Number:
JP2017238363A
Publication Date:
June 27, 2019
Filing Date:
December 13, 2017
Export Citation:
Assignee:
ULVAC CORP
International Classes:
C23C14/14; C23C14/35; H01F3/10
Domestic Patent References:
| JP2011058072A | 2011-03-24 | |||
| JPH0731853U | 1995-06-16 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda