Title:
成膜装置、ターゲットユニットの取り外し方法、及びターゲットユニットの取り付け方法
Document Type and Number:
Japanese Patent JP7362431
Kind Code:
B2
Abstract:
The present invention provides a film forming apparatus capable of promoting improvement in maintenance and repair. The film forming apparatus comprises: a target unit (100) which is installed in a chamber and has a target (110); an end block (200) having a bearing function of one end in an axial direction of the rotational center in the target unit (100); and a support block (300) having a bearing function of the other end in the axial direction of the rotational center in the target unit (100). The driving force for rotating the target unit (100) is connected to the target unit (100) from the inside of the end block (200). A coolant supplied to the target unit (100) and a voltage applied to the target (110) are connected to the target unit (100) from the inside of the support block (300).
Inventors:
Yukio Matsumoto
Application Number:
JP2019199222A
Publication Date:
October 17, 2023
Filing Date:
October 31, 2019
Export Citation:
Assignee:
Canon Tokki Corporation
International Classes:
C23C14/34; H05H1/46
Domestic Patent References:
| JP2018131644A |
Attorney, Agent or Firm:
Patent Attorney Corporation Shuwa Patent Office
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