Title:
成膜装置
Document Type and Number:
Japanese Patent JP6801887
Kind Code:
B2
Abstract:
A film deposition apparatus includes: a chamber 10 in which a target is provided and a film deposition gas is introduced thereinto and exhausted therefrom; and a film conveying part 100 disposed in the chamber 10 and conveying in a roll-to-roll manner a long film F that is the object. The film conveying part 100 includes: a rotatable roller 130 in which part of the peripheral surface thereof comes into contact with the long film F; and a nozzle pipe 200 that sprays an inert gas onto the roller 130 at a region being not covered by the long film F.
Inventors:
Hideko Sato
Hitoshi Sakamoto
Hitoshi Sakamoto
Application Number:
JP2018196891A
Publication Date:
December 16, 2020
Filing Date:
October 18, 2018
Export Citation:
Assignee:
Creative Coatings Co., Ltd.
International Classes:
C23C16/44; B65H23/24; B65H23/26; B65H26/04
Domestic Patent References:
| JP2012184492A | ||||
| JP8209329A | ||||
| JP2009209381A | ||||
| JP10298764A |
Attorney, Agent or Firm:
Inoue Ichi
Takekoshi Noboru
Yasushi Kuroda
Takekoshi Noboru
Yasushi Kuroda