Title:
FILM FORMING APPARATUS
Document Type and Number:
Japanese Patent JP2016108655
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a film forming apparatus having a shower head capable of quickly purging gas passages.SOLUTION: The film forming apparatus includes a shower head provided above a susceptor and having a first passage and a second passage independent of the first passage formed therein, wherein the first passage is formed through the shower head by being provided with a first cavity surrounded by a first upper wall and a first lower wall and expanding horizontally, a first thin hole formed in the first upper wall, and a plurality of second thin holes formed in the first lower wall; the height of the first upper wall in the vertical direction is reduced with increase in the distance from the first thin hole; the second passage is formed through the shower head by being provided with a second cavity surrounded by a second upper wall and a second lower wall and expanding horizontally, a third thin hole formed in the second upper wall, and a plurality of fourth thin holes formed in the second lower wall; and the height of the second upper wall in the vertical direction is reduced with increase in the distance from the third thin hole.SELECTED DRAWING: Figure 1
Inventors:
TSUJI NAOTO
SATO KAZUO
YAMAGISHI TAKAYUKI
SATO KAZUO
YAMAGISHI TAKAYUKI
Application Number:
JP2015199549A
Publication Date:
June 20, 2016
Filing Date:
October 07, 2015
Export Citation:
Assignee:
ASM IP HOLDING BV
International Classes:
C23C16/455; H01L21/205
Domestic Patent References:
| JP2008297597A | 2008-12-11 | |||
| JP2004296490A | 2004-10-21 | |||
| JP2012238644A | 2012-12-06 | |||
| JP2013247716A | 2013-12-09 | |||
| JP2015105405A | 2015-06-08 | |||
| JP2003504842A | 2003-02-04 | |||
| JP2009099972A | 2009-05-07 |
Attorney, Agent or Firm:
Mamoru Takada
Hideki Takahashi
Hideki Takahashi