Title:
Film deposition system
Document Type and Number:
Japanese Patent JP6087621
Kind Code:
B2
Inventors:
Daisuke Muto
Kimura Yusuke
Tomoya Utashiro
Seiichi Takahashi
Kimura Yusuke
Tomoya Utashiro
Seiichi Takahashi
Application Number:
JP2012285157A
Publication Date:
March 01, 2017
Filing Date:
December 27, 2012
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
H01L21/205; C23C16/455
Domestic Patent References:
| JP5175136A | ||||
| JP8335558A | ||||
| JP4279022A | ||||
| JP2007157885A | ||||
| JP2011198940A | ||||
| JP2012204791A | ||||
| JP2007201357A | ||||
| JP2003318112A | ||||
| JP2004535061A |
Attorney, Agent or Firm:
Jiro Kobe
Takeshi Senda
Kato Sasaya
Takeshi Senda
Kato Sasaya