Title:
成膜方法
Document Type and Number:
Japanese Patent JP5866815
Kind Code:
B2
Inventors:
Toshiharu Kurauchi
Application Number:
JP2011137349A
Publication Date:
February 24, 2016
Filing Date:
June 21, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/08; C23C14/24; H01B13/00
Domestic Patent References:
| JP2002030426A | ||||
| JP2001059157A | ||||
| JP51070492A | ||||
| JP11172416A | ||||
| JP56009906A | ||||
| JP56009905A | ||||
| JP8158041A | ||||
| JP2004063607A | ||||
| JP54130497A | ||||
| JP55104013A | ||||
| JP56086408A | ||||
| JP2163363A | ||||
| JP2112112A | ||||
| JP8017268A | ||||
| JP2001030409A | ||||
| JP58165212A |
Foreign References:
| US5374613 | ||||
| WO2010073666A1 |
Attorney, Agent or Firm:
Seiryu Corporation