Title:
成膜良否判定装置及び成膜良否判定方法
Document Type and Number:
Japanese Patent JP6963916
Kind Code:
B2
Abstract:
To provide a quality check system of a gas barrier film.SOLUTION: A deposition quality determination apparatus includes a physical quantity acquisition part for acquiring, together with a time, a physical quantity at a formation time of gas barrier in a film deposition apparatus for forming gas barrier on an inner surface of a container, a rate-of-change calculation part for calculating the rate of change of the physical quantity in a monitoring period, after the input time of information for instructing start of a deposition process, and until finish of the deposition process, and a quality determination part for determining the quality of deposition based on the rate of change calculated by the rate-of-change calculation part.SELECTED DRAWING: Figure 2
Inventors:
Bunichi Nakanishi
Kiyoshi Hirotani
Yasuhiro Okada
Kiyoshi Hirotani
Yasuhiro Okada
Application Number:
JP2017110894A
Publication Date:
November 10, 2021
Filing Date:
June 05, 2017
Export Citation:
Assignee:
Mitsubishi Heavy Industries Machinery Systems Co., Ltd.
International Classes:
C23C16/52; B65D23/02; C23C16/44
Domestic Patent References:
| JP2005067655A | ||||
| JP2003173973A | ||||
| JP2009054548A |
Attorney, Agent or Firm:
Yasushi Matsunuma
Eisuke Ito
Hiroyuki Hashimoto
Satoshi Koto
Koichiro Kamata
Taichi Hasegawa
Ryuichiro Mori
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Eisuke Ito
Hiroyuki Hashimoto
Satoshi Koto
Koichiro Kamata
Taichi Hasegawa
Ryuichiro Mori
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki