Title:
FILM FORMING APPARATUS AND COMPONENT PEELING APPARATUS
Document Type and Number:
Japanese Patent JP2019091887
Kind Code:
A
Abstract:
To provide a film forming apparatus and a component peeling apparatus capable of peeling an electronic component from a sheet while preventing leaving a residue on the electronic component.SOLUTION: In a film forming apparatus, an electronic component 60 having the electrode exposed surface attached to the adhesive surface of a protective sheet 61 is loaded. The film forming apparatus includes a film forming processing unit and a peeling processing unit 5. The film forming processing unit forms a film forming material on the electronic component 60. The peeling processing unit 5 peels off the electronic component 60 from the protective sheet 61 after film formation by the film forming processing unit. The peeling processing unit 5 includes a mounting table 51 that supports the electronic component 60 attached to the protective sheet 61, a chuck 52 that holds an end of the protective sheet 61, moves relative to the mounting table 51, and continuously performs peeling toward the opposite to the end, and a fixing unit that fixes the position of the electronic component 60.SELECTED DRAWING: Figure 16
Inventors:
NISHIGAKI HISASHI
SUZUKI HASHIO
YOSHIMURA KOJI
KAMBE YU
SUZUKI HASHIO
YOSHIMURA KOJI
KAMBE YU
Application Number:
JP2018190780A
Publication Date:
June 13, 2019
Filing Date:
October 09, 2018
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP
International Classes:
H01L21/683; C23C14/50; H01G2/22; H01G13/00
Domestic Patent References:
JP2003179126A | 2003-06-27 | |||
JP2015167205A | 2015-09-24 | |||
JP2008135662A | 2008-06-12 | |||
JP2011187827A | 2011-09-22 | |||
JP2016054169A | 2016-04-14 |
Foreign References:
WO2017033808A1 | 2017-03-02 | |||
WO2017038466A1 | 2017-03-09 |
Attorney, Agent or Firm:
Kiuchi Mitsuharu