Title:
成膜装置及び電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP7309773
Kind Code:
B2
Abstract:
Provided are a film formation apparatus capable of preventing scattering of a lubricant while preventing enlargement of an apparatus and a manufacturing method of an electronic device. The film formation apparatus comprises: a guidance rail (10) to which a lubricant is attached; a film formation source unit which at least has a film formation source closely coming in contact with the guidance rail (10) and moving in a movement direction along the guidance rail (10); and a cover member (61) which is mounted to the film formation source unit and covers a part of the guidance rail (10). The length of the cover member (61) in the movement direction becomes the first length when the film formation unit is located on the end of a movement range. The length of the cover member (61) in the movement direction becomes a second length, which is longer than the first length when the film formation unit moves.
Inventors:
Takuji Umezu
Masafumi Morishita
Masafumi Morishita
Application Number:
JP2021060069A
Publication Date:
July 18, 2023
Filing Date:
March 31, 2021
Export Citation:
Assignee:
Canon Tokki Corporation
International Classes:
C23C14/24
Domestic Patent References:
| JP2019026931A | ||||
| JP9264323A | ||||
| JP2016179532A | ||||
| JP7293560A |
Attorney, Agent or Firm:
Patent Attorney Corporation Shuwa Patent Office