To obtain a high-quality, long-life film, particularly an organic EL film, by controlling the pressures of a piping system, a starting material container and a blow out container, at the time of the initiation of film formation, during film formation and at the stoppage of film formation.
A film forming apparatus for forming a film by evaporating a starting material, transporting the evaporated starting material with a gas and discharging the material to a substrate from a gas discharging part, includes: an evaporation means; a flow channel for a transporting gas and a starting material disposed between the evaporation means and the gas discharging part; and a gas supply means for supplying the same kind of gas as the transport gas to the gas discharging part by use of the flow channel without passing the gas through the evaporation means. The control in which the starting material is made not to flow to the gas discharging part before film formation and at the stoppage of film formation and the control of supply of the gas from the gas supply means to the gas discharging part are performed at the transition period in a film formation state, and further the supply of gas is controlled such that the pressures of the gas discharging part and the evaporation means become equal to the pressure during film formation, while the control in which the gas from the gas supply means is made not to flow during film formation and the control for supplying the gas from the evaporation means are performed.
MATSUOKA TAKAAKI
NAKAYAMA SHOZO
ITO AKIYOSHI
TOKYO ELECTRON LTD
| JP2004010989A | 2004-01-15 | |||
| JP2004010990A | 2004-01-15 | |||
| JP2004217968A | 2004-08-05 |
Shuichi Fukuda