To provide a film forming composition (coating liquid) can form an insulated film with a low dielectric constant, the excellent mechanical strength and a good surface property, and an electronic device using the composition.
The film forming composition includes a polymer of a substituted styrene derivative represented by formula (1), (wherein R1 is a hydrogen atom, an alkyl group or an aryl group, R2 is a hydrogen atom, an alkyl group or an aryl group, R3 is an alkyl group, an aryl group, an alkoxy group, an acyloxy group, an aryloxy group, a hydroxy group, a carboxyl group, an alkoxy carbonyl group, an aryloxycarbonyl group, a trialkylsilyl group or a triarylsilyl group, in the case R3 is present by plurality, they may be either same or different, and they may be coupled with each other to form a ring structure, and n is an integer or 0-4).
INABE HARUKI
JPH023047A | 1990-01-08 | |||
JP2005133060A | 2005-05-26 | |||
JP2000264954A | 2000-09-26 | |||
JPH10330431A | 1998-12-15 | |||
JP2007254551A | 2007-10-04 | |||
JP2007009048A | 2007-01-18 | |||
JP2006245117A | 2006-09-14 |
Akiko Deep Sea
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