To execute the formation of a film of high quality at a high speed and to improve the utilizing rate of a film forming material.

A wire-shaped electrode 13 made of a film forming material is used as the cathode of a plasma torch. By applying voltage on the space between the wire-shaped electrode 13 and a nozzle 15 by a power source, an arc 37 is generated, and, by the arc 37, a plasma gas is plasmatized, and a plasma jet is jetted from the torch. By utilizing heat to accompany a thermionic emission phenomenon, the wire-shaped electrode 13 is instantaneously vaporized and is mixed to the plasma jet, which is sprayed on a substrate 55 as the object for film formation. Moreover, a control device 41 always monitors the arc voltage value and controls the automatic feed of the electrode 13 in such a manner that it consists with the set value. As the nozzle 15, a de Laval nozzle jetting the plasma jet at a supersonic speed is used.