To correctly control the film thickness in a film forming device using an aerosol deposition process.

This film forming device employs an aerosol deposition process which forms a film by blasting/accumulating a raw material powder to a substrate. In addition, the device comprises aerosol formation parts 1 to 4 which form the aerosol by dispersing the feedstock powder by gas, a film forming chamber 6, a substrate stage 8 arranged inside the film forming chamber 6, a nozzle 7 which jets the aerosol of the feedstock powder formed by the aerosol formation parts 1 to 4, to the substrate arranged on the substrate stage 8, an optical fiber for colorimetry 10 which optically measures the thickness of the film formed on the substrate on realtime, a colorimetric part 11 and a film thickness calculation part 12.

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