Title:
成膜装置
Document Type and Number:
Japanese Patent JP7048696
Kind Code:
B2
Abstract:
According to the present invention, a film forming device comprises: a container; a container support body installed in the outside of the container and supporting at least a portion of the container; a substrate holder installed in the container to retain and support a substrate; a mask holder installed in the container to support a mask; a substrate holder driving device driving the substrate holder; a mask holder driving device driving the mask holder; and a vibration transmission restraint member installed in at least one side between the container support body and the substrate holder driving device and between the container support body and the mask holder driving device.
Inventors:
Sekiya Toshifumi
Kimura Ryuji
Tatsuya Shinkai
Shunsuke Okabe
Kimura Ryuji
Tatsuya Shinkai
Shunsuke Okabe
Application Number:
JP2020172698A
Publication Date:
April 05, 2022
Filing Date:
October 13, 2020
Export Citation:
Assignee:
Canon Tokki Co., Ltd.
International Classes:
C23C14/24; C23C14/04; C23C14/50; H01L51/50; H05B33/10
Domestic Patent References:
| JP2012033468A | ||||
| JP2005308145A | ||||
| JP2020518121A |
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yumitsu
Tomotake Ogawa
Ryo Okawa
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yumitsu
Tomotake Ogawa
Ryo Okawa