Title:
Film-forming mask, its manufacturing method, and film-forming mask repair method
Document Type and Number:
Japanese Patent JP6341434
Kind Code:
B2
Abstract:
A deposition mask includes: a mask sheet formed by stacking a metal layer provided with a plurality of through holes on a film layer provided with a plurality of opening patterns, each through hole enclosing at least one of the opening patterns, and by dividing one surface of the mask sheet into a plurality of unit cells each including two or more of the opening patterns and two or more of the through holes; and a support member which is made of metal and has openings corresponding to the unit cells of the mask sheet, the support member supporting the mask sheet by being joined to the metal layer of the mask sheet to which no external tension is applied. This ensures high shape and positional deposition accuracy in forming thin film patterns using the deposition mask.
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Inventors:
Shuji Kudo
Ryo Noguchi
Yuji Saito
Han Chihua
Ryo Noguchi
Yuji Saito
Han Chihua
Application Number:
JP2016241333A
Publication Date:
June 13, 2018
Filing Date:
December 13, 2016
Export Citation:
Assignee:
Buoy Technology Co., Ltd.
International Classes:
C23C14/04; C23C14/24
Domestic Patent References:
| JP2014133938A | ||||
| JP2013165060A | ||||
| JP2015010270A | ||||
| JP2014121720A | ||||
| JP2004335382A |
Attorney, Agent or Firm:
Moriaki Ogawa
Haruyuki Nishiyama
Shoichi Okuyama
Haruyuki Nishiyama
Shoichi Okuyama
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