Title:
FILM FORMING METHOD FOR MULTICOMPONENT OXIDE FILM SUPERCONDUCTING FILM
Document Type and Number:
Japanese Patent JPH04300292
Kind Code:
A
Abstract:
PURPOSE:To form a thin multicomponent oxide superconducting film of Y, Ba and Cu in which regions of (100) face-oriented crystals and regions of (110) face-oriented crystals are mixed on an SiC wafer. CONSTITUTION:Thin films 2 of ZrO2 oriented in the (100) face are formed in regions for forming a thin superconducting film finally oriented in the (001) face on an SiC substrate 1 having the (100) face as a film-forming surface. A thin Y2O3 film 3 is then formed on the SiC wafer in other regions and the aforementioned thin ZrO2 films 2. Furthermore, a thin multicomponent oxide film 4 of Y, Ba and Cu is formed on the above-mentioned thin Y2O3 film 3 to orient a Y-Ba-Cu multicomponent oxide in the (001) face in regions on the thin ZrO2 films 2 and further in the (110) face in the other regions.
Inventors:
NAKANISHI SHUSUKE
SHIKADA SHINICHI
ITOZAKI HIDEO
SHIKADA SHINICHI
ITOZAKI HIDEO
Application Number:
JP8791791A
Publication Date:
October 23, 1992
Filing Date:
March 26, 1991
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C01G1/00; C01G3/00; C04B41/89; C23C14/06; C30B29/22; H01B12/06; H01L39/24; (IPC1-7): C01G1/00; C01G3/00; C04B41/89; C23C14/06; C30B29/22; H01B12/06; H01L39/24
Attorney, Agent or Firm:
Takashi Koshiba