FILM FORMING PROCESSOR
Document Type and Number:
Japanese Patent JP3258885
PROBLEM TO BE SOLVED: To speedily control pressure in a treatment case.
SOLUTION: A film forming device is provided with the treatment case 56 into which treatment gas for film formation is guided and is evacuated, a mounting stage 68 which is provided by making it face treatment space S in the treatment case 56 for mounting a body W to be treated on an upper face, a breather port 132 which is provided at the outer periphery of the mounting stage 68 and connects treatment space S and the air exit 66 of the treatment case 56 and a pressure regulating valve body 130 which is movably provided for ht event port 132 and regulates the pressure of the treatment space S. Thus, the opening of the breather is regulated by moving the pressure regulating valve body and the pressure of treatment space is regulated.
December 07, 2001
December 27, 1995
TOKYO ELECTRON LTD
C23C16/52; C23C16/455; H01L21/205; H01L21/285; C23C16/52; C23C16/455; H01L21/02; (IPC1-7): C23C16/455; C23C16/52; H01L21/205; H01L21/285