Title:
FILM FORMING PROCESSOR
Document Type and Number:
Japanese Patent JP3258885
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To speedily control pressure in a treatment case.
SOLUTION: A film forming device is provided with the treatment case 56 into which treatment gas for film formation is guided and is evacuated, a mounting stage 68 which is provided by making it face treatment space S in the treatment case 56 for mounting a body W to be treated on an upper face, a breather port 132 which is provided at the outer periphery of the mounting stage 68 and connects treatment space S and the air exit 66 of the treatment case 56 and a pressure regulating valve body 130 which is movably provided for ht event port 132 and regulates the pressure of the treatment space S. Thus, the opening of the breather is regulated by moving the pressure regulating valve body and the pressure of treatment space is regulated.
Inventors:
Takashi Horiuchi
Masami Mizukami
Shinpei Jinnai
Masami Mizukami
Shinpei Jinnai
Application Number:
JP35180095A
Publication Date:
February 18, 2002
Filing Date:
December 27, 1995
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/52; C23C16/455; H01L21/205; H01L21/285; (IPC1-7): C23C16/455; C23C16/52; H01L21/205; H01L21/285
Domestic Patent References:
| JP54466U | ||||
| JP590939U |
Attorney, Agent or Firm:
Akihiro Asai
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