Title:
FILM FOR GAS SENSOR, ELEMENT FOR GAS SENSOR AND METHOD FOR MANUFACTURING THE ELEMENT FOR GAS SENSOR
Document Type and Number:
Japanese Patent JP2007071866
Kind Code:
A
Abstract:
To provide a film for gas sensor which has high responsiveness with respect to an object gas to be sensed and can be used repeatedly, and to provide an element for gas sensor and a method for manufacturing them.
The film is made up by dispersing minute particles of a group VIII metal into a thin film-shaped substrate made of tungsten trioxide, and at least a portion of the tungsten trioxide composing the thin film-shaped substrate is in an amorphous state. It is preferable that the state is one in which all the minute particles of the group VIII metal are made embedded inside the thin film-shaped substrate. Furthermore, the tungsten trioxide composing the thin film-shaped substrate is preferably in a porous state.
Inventors:
NISHIO KEIJI
KINERI TORU
FUJIMOTO MASAKATSU
MAE HIDEO
KINERI TORU
FUJIMOTO MASAKATSU
MAE HIDEO
Application Number:
JP2006200971A
Publication Date:
March 22, 2007
Filing Date:
July 24, 2006
Export Citation:
Assignee:
UNIV OF SCIENCE TOKYO
YAMAGUCHI PREFECTURE
YAMAGUCHI PREFECTURE
International Classes:
G01N31/22; G01N21/77; G01N21/78
Domestic Patent References:
| JP2003166938A | 2003-06-13 | |||
| JPH0335138A | 1991-02-15 | |||
| JPS60211348A | 1985-10-23 | |||
| JPS61204545A | 1986-09-10 | |||
| JPH05261284A | 1993-10-12 | |||
| JP2003329592A | 2003-11-19 | |||
| JPS60211347A | 1985-10-23 | |||
| JPH05261284A | 1993-10-12 |
Attorney, Agent or Firm:
Masahiko Oi
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