Title:
FILM REMOVAL PROCESSING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP2019107692
Kind Code:
A
Abstract:
To provide a film removal processing method and device.SOLUTION: A film removal processing device comprises a device optical assembly, the device optical assembly comprises: a laser generator for generating laser beam; a first scan mirror for reflecting laser beam; a second scan mirror for reflecting maser beam reflected by the first scan mirror; and a focusing mirror which focuses laser beam reflected by the second scan mirror onto a thin film solar battery cell, thereby performing film removal processing. This device further comprises a processor and a memory, and a command is stored in the memory. The command is executed by the processor, whereby the thin film solar battery cell or the optical assembly is moved to a specified position, the first scan mirror and/or the second scan mirror is so controlled as to be rotated, and thus, a step, at which film removal processing is performed for the thin film solar battery cell, can be realized.SELECTED DRAWING: Figure 5
Inventors:
HUANG TONGYANG
XU XIAO HUA
WANG XUDONG
GUO ZHENG
CAI CEN
XU XIAO HUA
WANG XUDONG
GUO ZHENG
CAI CEN
Application Number:
JP2018142381A
Publication Date:
July 04, 2019
Filing Date:
July 30, 2018
Export Citation:
Assignee:
BEIJING JUNTAIINNOVATION TECH CO LTD
International Classes:
B23K26/351; B23K26/00; B23K26/082; H01L31/0463; H01L31/18
Attorney, Agent or Firm:
Isshiki International Patent Service Corporation