Title:
Film thickness measuring device and method
Document Type and Number:
Japanese Patent JP6331133
Kind Code:
B2
Inventors:
Seiji Fukutomi
Ohashi Takeru
Norihito Kawaguchi
Soichiro Oumi
Fumio Matsuzaka
Ohashi Takeru
Norihito Kawaguchi
Soichiro Oumi
Fumio Matsuzaka
Application Number:
JP2014138473A
Publication Date:
May 30, 2018
Filing Date:
July 04, 2014
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
G01B11/06; G01B15/02
Domestic Patent References:
| JP2010139402A | ||||
| JP8271219A | ||||
| JP88167A | ||||
| JP10170217A | ||||
| JP6488302A | ||||
| JP2011196990A | ||||
| JP201466619A |
Foreign References:
| EP2157420A1 |
Attorney, Agent or Firm:
Minoru Hotta
Toshihiro Nomura
Toshihiro Nomura