Title:
FILM THICKNESS MONITOR FOR THIN FILM PRODUCTION
Document Type and Number:
Japanese Patent JPS5279953
Kind Code:
A
Inventors:
TOKU AKIHIKO
Application Number:
JP15484775A
Publication Date:
July 05, 1977
Filing Date:
December 26, 1975
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01B11/06; (IPC1-7): G01B11/06