PURPOSE: To obtain a piezoelectric/electrostrictive film type actuator having the high speed of response and large generating force by laminating a first electrode film, a piezoelectric/electrostrictive film and a second electrode film onto a ceramic substrate.
CONSTITUTION: A lower electrode film 4, a piezoelectric/electrostrictive film 6 and an upper electrode film 8 are laminated successively onto one surface of a ceramic substrate 2. The lower and upper electrode films 4, 8 are extended from the end section of the piezoelectric/electrostrictive film 6 respectively, lead sections 4a, 8a are shaped, and electricity is conducted through each electrode film 4, 8 through these lead sections 4a, 8a. The electric-field induced strain of the piezoelectric/electrostrictive film 6 is induced by conduction, and flexing displacement in the direction vertical to the board surface of the ceramic substrate 2 or generating force is developed by the transversal effect of the strain. Accordingly, large displacement is acquired at low driving voltage, and a piezoelectric/electrostrictive film type actuator, the speed of response of which is increased and the degree of integration of which can be improved, is obtained.
KOMAZAWA MASATO
KIMURA KOJI
| JPS56131782A | 1981-10-15 | |||
| JPS63107469A | 1988-05-12 |