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Patent Searching and Data


Title:
PIEZOELECTRIC/ELECTROSTRICTION FILM TYPE ACTUATOR
Document Type and Number:
Japanese Patent JPH11346012
Kind Code:
A
Abstract:

To provide a piezoelectric/electrostriction film type actuator capable of notably bending-displaced even in low voltage driving work by making a piezoelectric/electrostriction film finer in the heat-treating time to be almost completely sintered for displaying specific piezoelectric characteristics.

A piezoelectric/electrostriction film type actuator is composed by performing the following procedures, i.e., the condensed metallic grain whereto ceramics oxide adheres is dispersed into a conductive film 2 to be lamination- integrated into a thin-walled ceramic substrate 1 so as to make the surface of the conductive film irregular after lamination-integrating a piezoelectric/ electrostriction film 3 on this conductive film 2 furthermore, an electrode film 4 is lamination-integrated with the piezoelectric/electrostriction film 3.


Inventors:
Gendoshi, Takuya
Application Number:
JP1998000150442
Publication Date:
December 14, 1999
Filing Date:
May 29, 1998
Export Citation:
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Assignee:
KYOCERA CORP
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; H01L41/09; H01L41/22; H01L41/29; H02N2/00; H01H57/00; (IPC1-7): H01L41/09; B41J2/045; B41J2/055; H01L41/22; H02N2/00