Title:
PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE ELEMENT
Document Type and Number:
Japanese Patent JP3482939
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To remove an incomplete connecting part between a piezoelectric film/electrostrictive film 5 and a substrate 1 on a thin diaphragm part 3, and to reduce greatly dispersion of a vibration made.
SOLUTION: A lower electrode 4 of the substrate 1 is formed continuously from the upper part on the thin diaphragm part 3 to the upper part on a thick part 2, and an auxiliary electrode 8 is formed independently thereof on the thick part 2 of the substrate 1. The piezoelectric/electrostrictive film 5 is formed straddling both electrodes.
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Inventors:
Nobuo Takahashi
Mutsumi Kitagawa
Hirofumi Yamaguchi
Mutsumi Kitagawa
Hirofumi Yamaguchi
Application Number:
JP2000136198A
Publication Date:
January 06, 2004
Filing Date:
May 09, 2000
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
G01L9/00; G01N11/16; H01L41/08; H01L41/09; H01L41/187; H01L41/193; (IPC1-7): G01N11/16; G01L9/00; H01L41/08; H01L41/187; H01L41/193
Domestic Patent References:
| JP6260694A | ||||
| JP5267742A | ||||
| JP11281561A | ||||
| JP7202284A |
Attorney, Agent or Firm:
Yoshiki Ishida
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