To suppress the fluctuations in the temperature of gas before and after passage while keeping the removal capacity of a chemical substance in the passing gas.
A filter part 26 having at least one filter medium 24 for removing a chemical substance from gas has properties for suppressing the fluctuations in the temperature of gas before and after passage to a predetermined range. Therefore, the chemical substance contained in the gas during passage is removed by the filter medium 24 constituting a filter apparatus 20 and the temperature of the passing gas is suppressed to the predetermined range before and after the passage of the gas by the filter part 26. That is the fluctuations in the temperature of gas before and after passage can be suppressed as compared with a conventional filter apparatus while keeping the removal capacity of the predetermined chemical substance contained in the passing gas.
KARIBE FUMIO
UDAGAWA KENJI
YOSHIDA TOMOYUKI
NIKON CORP
JPH10230117A | 1998-09-02 |
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